Large displacement vertical translational actuator based on piezoelectric thin films
نویسندگان
چکیده
منابع مشابه
Large displacement vertical translational actuator based on piezoelectric thin films.
A novel vertical translational microactuator based on thin-film piezoelectric actuation is presented, using a set of four compound bend-up/bend-down unimorphs to produce translational motion of a moving platform or stage. The actuation material is a chemical-solution deposited lead-zirconate-titanate (PZT) thin film. Prototype designs have shown as much as 120 μm of static displacement, with 80...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2010
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/20/7/075016